{"id":146,"date":"2015-02-27T01:19:30","date_gmt":"2015-02-27T01:19:30","guid":{"rendered":"https:\/\/www.eet.bme.hu\/?page_id=146"},"modified":"2019-10-11T18:41:35","modified_gmt":"2019-10-11T16:41:35","slug":"infrastructure-2","status":"publish","type":"page","link":"https:\/\/www.eet.bme.hu\/en\/rdi\/infrastructure-2\/","title":{"rendered":"Infrastructure"},"content":{"rendered":"

Brief description of the research infrastructure<\/h1>\n

BME\u00a0Department of Electron Devices is the only university department in Hungary, where research and education portfolio includes microelectronics; semiconductor devices; micro and nanoelectronic devices; VLSI electronics; semiconductor sensors; LEDs; solar cells; MEMS and SiP\/SoP smart system design, manufacturing and testing. We have\u00a0significant results in the field of information technology as well. These are related to computer aided design of micro and nanoelectronics and Internet-based communication. The infrastructural background is provided by our laboratory complexes rebuilt between 2010 and 2012 in the Q building of the University, namely the Thermal Testing Laboratory, the Integrated Smart System Design Laboratories and the Semiconductor and Reliability Laboratories.<\/p>\n

Semiconductor and Reliability Testing Laboratories<\/h2>\n

Cleanroom<\/h3>\n

Class 1000 (ISO 6) and Class 10000 (ISO 7) cleanroom laboratory with 2-3 inch\u00a0silicon wafer processing for realization of diodes, MOS circuits,\u00a0sensors, novel devices, microfluidics and solar cell structures. Available processes: fotolithography (1 um resolution, two-sided\u00a0alignment), wet chemistry (cleaning, isotropic and anisotropic etching),\u00a0surface treatment (O2, N2, Ar plasma), high-temperature processes (oxidation, dopant diffusion, annealing), evaporation (Al, Au, Ag, Ni,\u00a0Ti, Cu), RF sputtering (Pt, Pd, Ti, V, Ta, Al, Cu, Ag, Mo, Fe, Ni, SnO2,\u00a0ZnO, Si, SiC, Sn-In, SiO2, Si3N4, Al2O3), spin-coating (SiO2, PDMS, SU-8), screen-printing (Al, Ag). The laboratory also has capabilities\u00a0for the investigation of the processed samples or devices: optical\u00a0microscopy, SEM, mechanical profilometry, Spreading resistance probe, SPV and Kelvin probe surface potential mapping, CV curve acquisition, as\u00a0well as specific, project related individual measurements, e.g. self\u00a0developed solar cell testing equipment (I-V and SR).<\/p>\n

Contact:<\/b>
\nDr. Bal\u00e1zs Plesz<\/a><\/p>\n

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Bonding in the Semiconductor Laboratory<\/p><\/div>\n

Rapid Prototyping Laboratory<\/h3>\n

Prototyping\u00a0and production of microfluidic devices on PDMS and SU-8 based\u00a0technology (10 um resolution). Fabrication of PDMS-glass, PDMS-silicon,\u00a0PDMS-SU-8 heterostructures and PDMS membranes. Development and\u00a0prototyping of in-channel integrated sensors: electrodes produced by\u00a0vacuum evaporation and RF sputtering, temperature and photo sensors.\u00a0Surface treatment of microchannels in Oxygen and Nitrogen plasma.\u00a0Fabrication of integrated valves in PDMS chips. Integrated, programmable\u00a0test environment based on Micronit Fluidic Connect Pro standard.\u00a0Generation of controlled flows (100 nl\/sec resolution) with optical (120\u00a0fps) and pressure sensors (10 Pa resolution) feedback. One phase, and\u00a0two phase (oil-water and gas-water droplet flows) and multiphase\u00a0(magnetic nanobead) flow in thermally steady environment. Standard\u00a0equipments for biofluid handling (centrifuge, vortex, laminar box,\u00a0pipettes, US chamber).<\/p>\n

Contact:<\/b>
\nDr. Ferenc Ender<\/a><\/p>\n

<\/h2>\n
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Rapid prototyping of a microfluidic system<\/p><\/div>\n

Thermal Testing Laboratory<\/h2>\n

Numerous international and national projects were based on the know-how and advanced infrastructure of this laboratory. This laboratory is specialized mainly in the thermal and multidomain characterization of\u00a0various semiconductor devices and their assembly\/packaging, like packaged ICs, discrete devices, power electronics, solar cells, LEDs and MEMS, including the non-destructive examination of such structures. Beyond the general instruments this laboratory is equipped with special equipment compliant with the latest international standards (e.g. JEDEC JESD51-14, JEDEC JESD51-51 and 51-52) for thermal transient testing and radiometric\/photometric characterization. IR cameras are also available for thermal investigations. This laboratory environment enables the testing of special structures like organic light emitting devices and nanoparticle-based thermal interface materials (TIMs).<\/p>\n

Contact:<\/b>
\nProfessor Andr\u00e1s Poppe<\/a>, Head of Department<\/p>\n

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Radiometric measurement using the TERALED equipment<\/p><\/div>\n

Integrated Smart System Design Laboratories<\/h2>\n

These laboratories have the latest industrial CAD softwares for complex, highly integrated, mixed-signal integrated circuit schematic and layout design, functional pre-layout and post-layout simulation. As a result of our\u00a0R&D activities the multi-domain modelling of these circuits is also possible: our software tools enable the simultaneous evaluation of electric and thermal behavior with the aid of electro-thermal and logi-thermal simulations. Furthermore, the design, numerical modeling and simulation of sensors and actuators (MEMS), as building blocks for integrated smart systems, are also possible in advanced simulation environments. The design of complex RF PCBs are supported by the latest design tools and post-layout simulation softwares, enabling the\u00a0evaluation of RF wave propagation properties, like reflection and electrical crosstalk.<\/p>\n

The 3 laboratories in the lab complex are namely the Mentor Graphics IC Design Laboratory (25 seats – CAD stations), the Ericsson Complex Hardware Design Lab (25 seats – CAD and FPGA design stations) and the Digital Innovation Laboratory (5 seats each for an individual innovation project).<\/p>\n

Contact:<\/b>
\nDr. Andr\u00e1s Tim\u00e1r<\/a><\/p>\n

\"\"

Mentor Graphics IC Design Laboratory<\/p><\/div>\n","protected":false},"excerpt":{"rendered":"

Brief description of the research infrastructure BME\u00a0Department of Electron Devices is the only university department in Hungary, where research and education portfolio includes microelectronics; semiconductor devices; micro and nanoelectronic devices; VLSI electronics; semiconductor sensors; LEDs; solar cells; MEMS and SiP\/SoP smart system design, manufacturing and testing. We have\u00a0significant results in the field of information technology […]<\/p>\n","protected":false},"author":6,"featured_media":0,"parent":148,"menu_order":0,"comment_status":"closed","ping_status":"open","template":"","meta":[],"_links":{"self":[{"href":"https:\/\/www.eet.bme.hu\/en\/wp-json\/wp\/v2\/pages\/146"}],"collection":[{"href":"https:\/\/www.eet.bme.hu\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.eet.bme.hu\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.eet.bme.hu\/en\/wp-json\/wp\/v2\/users\/6"}],"replies":[{"embeddable":true,"href":"https:\/\/www.eet.bme.hu\/en\/wp-json\/wp\/v2\/comments?post=146"}],"version-history":[{"count":0,"href":"https:\/\/www.eet.bme.hu\/en\/wp-json\/wp\/v2\/pages\/146\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/www.eet.bme.hu\/en\/wp-json\/wp\/v2\/pages\/148"}],"wp:attachment":[{"href":"https:\/\/www.eet.bme.hu\/en\/wp-json\/wp\/v2\/media?parent=146"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}